236 Technical Supported Products 1 $PTU SFEVDUJPO DPNQBSFE UP 5SBEJUJPOBM 1SPEVDUT 0O BWFSBHF 24UBOEBSE 2$SPTTFE SPMMFS DPNQBSJTPO 9$34 1BSU /VNCFS 4UBHF 4VSGBDF NN 5SBWFM %JTUBODF NN 5SBWFM QFS 3PUBUJPO NN -PBE $BQBDJUZ / 5SBWFM "DDVSBDZ 8FJHIU LH 5ZQF /P )PSJ[POUBM 7FSUJDBM 4USBJHIUOFTT 9'&4 25x25 ±5 0.5 29.4 9.8 50μm 0.04 40x40 ±7 0.08 60x60 ±8 39.2 19.6 0.18 24UBOEBSE 9 "YJT %PWFUBJM 4 Surface Treatment: Black Anodize . Material: Aluminum Alloy 10 5 0 5 10 10 5 0 5 10 34 (9.8) 60 (19.5) 50 25 17 7 7 Ø12 25 60 25 25 8-M4, Depth 6 4-M5 Ø8 Counterbore, Depth 4.5 9 Ø10 50 9'&4 12.5 (12) 25 10 7 7 Ø12 10 8-M2, Depth 5 20 9 Ø10 (19.5) 25 15 10 10 20 5 0 5 5 0 5 4-M2.5 Ø4.2 Counterbore, Depth 2.7 9'&4 * M2, Depth 4 * M2, Depth 4 10 5 0 5 10 10 5 0 5 10 23.5 (9.8) 40 40 (19.5) 32 16 15 7 7 Ø12 16 16 8-M3, Depth 6 4-M4 Ø6.5 Counterbore, Depth 3.5 16 32 9 Ø10 9'&4 1BSU OVNCFS XPG60 XCRS60 (VJEF Crossed Roller Crossed Roller 5IJDLOFTT 20mm 20mm 5PQ GBDF TJ[F 60 X 60 mm 60 X 60 mm 1SFDJTJPO High Precision Stage Standard Precision Stage 5SBWFM "DDVSBDZ 4USBJHIUOFTT 3μm 30μm 4USPLF ±6.5mm ±6.5mm TYPE CODE : 9$34 TYPE CODE : 9'&4 &For more variation, see P60 (Index by function) " 4UBHF 4VSGBDF NN -PBE $BQBDJUZ / .BY )PMEJOH 'PSDF / 3FG 5SBWFM "DDVSBDZ "MMPXBCMF .PNFOU /tDN .PNFOU 3JHJEJUZ /tDN 1BSBMMFMJTN 8FJHIU LH )PSJ[POUBM 7FSUJDBM 4USBJHIUOFTT .PUJPO 1BSBMMFMJTN 1JUDIJOH :BXJOH 3PMMJOH 1JUDIJOH :BXJOH 3PMMJOH 25x 25 9.8 4.9 60 30μm 30μm 1.1 0.8 0.4 3.03 2.85 1.80 50μm 0.04 40x 40 19.6 9.8 2.7 2.2 2.0 0.38 0.42 0.28 0.14 60x 60 49 19.6 5.2 4.3 5.5 0.12 0.11 0.07 0.24 80x 80 98 49 70 19.2 15.1 17.3 0.05 0.05 0.04 60μm 0.39 100×100 147 36.0 30.0 33.0 0.06 0.07 0.05 0.58 120×120 196 57.2 44.7 66.7 0.03 0.02 0.01 0.95 R4UBOEBSE 9 "YJT $SPTTFE SPMMFS A F A (J) (B) E T X G D X Q Clamp (M3x5) (M2x3.5 for A=25) 4-d1 Through, d2 Counterbore, Depth 1 P
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