Air Slide Table, Clean and Low Dust Generation 13 / 20 / 22-MXQ Series (Part Numbers - CAD Download)

[13-Series Clean Series]
・ This product can be used in a clean environment.
・ Prevents dust generation in the cleanroom.
[20-Series Copper/Fluorine-Free Specifications]
・ It can be used in environments where copper and fluorine materials should be avoided.
・ External dimensions are the same as standard products.
[22-Series, Copper-Free / Fluorine-Free / Silicone-Free + Low Dust Generation]
・ This product can be used in environments with restrictions on copper-based, fluorine-based, and silicone-based materials.
·The structure is the same as the clean series (grease and packaging form are different from the clean series).

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Product specification
Part Numbers
Catalog

Please refer to the table below for details about lead wire / connector specifications.

Data to be displayed: 30; 45; 60

Part Number
13-MXQ6-10
13-MXQ6-20
13-MXQ6-40
13-MXQ6L-10A
13-MXQ6L-20
13-MXQ6L-40
13-MXQ6L-50

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Load Mass (Range Selectable) (kg)	Table Size Length L (mm)	Cylinder Inner Diameter (Ø)	Usage Environment	Table Size Width W (mm)	Table Size Height H (mm)	Table Parallelism (µm)	Piping Format	Port Screw Type	Adjuster Option	Specifications	Number of Switches	Custom-made Specifications	Model	Type
606.03 €	1	26 Days	10	0.05~0.8	63	6	Dust-Proof / Cleanroom	27	20	25	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
650.47 €	1	26 Days	20	0.05~0.8	73	6	Dust-Proof / Cleanroom	27	20	30	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
754.97 €	1	26 Days	40	0.05~0.8	101	6	Dust-Proof / Cleanroom	27	20	40	Standard type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
719.60 €	1	26 Days	10	0.05~0.8	63	6	Dust-Proof / Cleanroom	27	20	25	Symmetrical type	M screw	Dual-end rubber stoppers	Standard	Without auto switch (built-in magnet)	None	None	Clean series
656.50 €	1	26 Days	20	0.05~0.8	73	6	Dust-Proof / Cleanroom	27	20	30	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
761.00 €	1	26 Days	40	0.05~0.8	101	6	Dust-Proof / Cleanroom	27	20	40	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series
808.05 €	1	26 Days	50	0.05~0.8	111	6	Dust-Proof / Cleanroom	27	20	45	Symmetrical type	M screw	No adjuster	Standard	Without auto switch (built-in magnet)	None	None	Clean series

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Basic information

Type	L-Shaped Table Type	Table Material	Aluminum	Table Surface Treatment	Electroless Nickel Plating
Guide	Linear guide type	Operating Pressure(MPa)	0.15 to 0.7	End Block	None
Custom-made	None

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Basic Attributes

Stroke(mm)
10

20

30

40

50

75

100

125

150
Clear
Table Size Length L(mm)
63

70

73

80

94

101

104

108

111

118

121

128

131

133

144

147.5

156

159

175

176

181.5

192

200

206.5

219

244

245.5

249

277

305

323.5
Clear
Cylinder Inner Diameter(Ø)
6

8

12

16

20

25
Clear
Usage Environment
- Dust-Proof
- Copper-Based / Fluorine-Based Material Not Used
- Cleanroom
Clear
Table Size Width W(mm)
27

32

39

46

49

60

74
Clear
Table Size Height H(mm)
20

23

30

37

46

55
Clear
Table Parallelism(µm)
25

30

35

40

45

50

55

60

65

70

75

80

95

105

125
Clear
Piping Format
Standard type

Symmetrical type
Clear
Port Screw Type
- G
- M screw
- Rc
Clear
Adjuster Option
Dual-end metal stoppers

Dual-end rubber stoppers

Forward-end metal stopper

Forward-end rubber stopper

No adjuster
Clear
Specifications
- Axial direction piping type
- Standard
Clear
Number of Switches
M9N

A93

Without auto switch (built-in magnet)
Clear
Custom-made Specifications
- 0.5
- 3
- None
Clear
Model
- 2 pcs.
- None
Clear
Type
- Clean series
- Copper and Fluorine Unavailable Specifications
- Copper/fluorine/silicon-free + low dust generation
Clear
Type
- 13-MXQ
- 20-MXQ
- 22-MXQ
Clear
Max. Load Mass (Range Selectable)(kg)
0.05~0.8

1~4.9

5~9.2
Clear
Filter by CAD data type
- 2D
- 3D
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