Filter regulator, MS4 Series (MS4-LFR-1/4-D7-EUV-AS)

Basic Attributes

• Filter, Filtration Level

  • 5 μm
  • 40µm

  Clear

• Bowl guard

  • Integrated as metal bowl guard
  • Plastic bowl guard

  Clear

• Standard nominal flow rate(l/min)

  • 850
  • 900
  • 1000
  • 1200
  • 1500
  • 1700

  Clear

• Pneumatic connection 1

  • G1/4
  • G1/8

  Clear

• Pneumatic connection 2

  • G1/4
  • G1/8

  Clear

• Max. condensate volume(ml)

  • 19
  • 25

  Clear

• Material of bowl

  • Die-cast aluminum, Wrought aluminum alloy
  • PC

  Clear

• Min. Operating pressure(bar)

  • 0.8
  • 2

  Clear

• Max. Operating pressure(bar)

  • 12
  • 14

  Clear

• Min. Pressure regulation range(bar)

  • 0.3
  • 0.5

  Clear

• Max. Pressure regulation range(bar)

  • 7
  • 12

  Clear

• Min. Temperature of medium(°C)

  • -10
  • 5

  Clear

• Min. Ambient temperature(°C)

  • -10
  • 5

  Clear

• Operating medium

  • Compressed air as per ISO 8573-1:2010 [6:4:4]
  • Compressed air as per ISO 8573-1:2010 [7:4:4]
  • Compressed air as per ISO 8573-1:2010 [7:8:4], Inert gas

  Clear

• Air quality class at the output

  • Compressed air as per ISO 8573-1:2010 [-:4:-], Inert gas
  • Compressed air as per ISO 8573-1:2010 [7:4:-], Inert gas
  • Compressed air as per ISO 8573-1:2010 [7:9:-], Inert gas

  Clear