Electric Slider, EZS Series

The EZS Series is a compact, high stiffness, simple dust-proof electric slider.
Equipped with AlphaStep AZ Series and AR Series in the motor part. High response, low vibration, and movement without hunting, which are unique to stepper motors, are realized with an electric slider.
[Features]
・ High stiffness and low profile guide
・ Space saving by the folded motor
・ Simple dust-proof structure prevents foreign object from entering and suppresses dust generation
・ Cleanroom compatible

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Part Numbers

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Part Number
EZS6-E020-ARAA-1
EZS6-E030-ARAKD-3
EZS6-E035-ARACD-3
EZS6-E040-ARMA-2
EZS6-E075-ARAA-3
EZS6-E080-ARMKD-3
EZS6-E085-ARAC-3
EZS6L-E040-ARMK-1
EZS6R-E015-ARMCD-3
EZSM6CLE010AZMK
EZSM6CLE015AZMK
EZSM6CLE020AZAK
EZSM6CLE040AZAK
EZSM6CLE065AZMC
EZSM6CRE010AZMK
EZSM6CRE015AZMK
EZSM6CRE020AZAK
EZSM6CRE035AZAK
EZSM6CRE040AZAK
EZSM6E005AZMK
EZSM6E010AZAC
EZSM6E010AZAK
EZSM6E015AZAC
EZSM6E020AZMC
EZSM6E025AZAC
EZSM6E025AZMK
EZSM6E030AZAC
EZSM6E035AZMK
EZSM6E040AZMC
EZSM6E045AZMC
EZSM6E050AZMC
EZSM6E050AZMK
EZSM6E060AZMC
EZSM6E065AZAC
EZSM6E065AZMC
EZSM6E070AZAC
EZSM6E070AZMC
EZSM6E075AZAC
EZSM6E075AZMC
EZSM6E080AZMC
EZSM6E085ARAK
EZSM6E085AZAC
EZSM6LE005AZAC
EZSM6LE005AZMK
EZSM6LE030AZAC
EZSM6LE030AZAK
EZSM6LE060AZMK
EZSM6RE005AZMK
EZSM6RE010AZMC
EZSM6RE015AZMK
EZSM6RE030AZMK
EZSM6RE035AZAK
EZSM6RE040AZMC
EZSM6RE055AZMC

Standard Unit Price	Minimum order quantity	Standard Shipping Days ?	Stroke (mm)	Max. Transportable Mass Range (Horizontal) (kg)	Max. Transportable Mass (Horizontal) (kg)	Max. Transportable Mass Range (Vertical) (kg)	Max. Transportable Mass (Vertical) (kg)	Input Power Supply	Table Width W1 (mm)	Electromagnetic Break	Max. Thrust Force Range (N)	Max. Thrust Force (N)	Cable	Table Length L1 (mm)	Maximum Velocity (mm/sec)	Motor Mounting Direction	Driver Type	Slider Size (mm)	On-Board Motor	Motor Part Shape	Suction Fitting Direction	Product Type
1,353.77 €	1	38 Days	200	50.1 to 100.0	-	-	-	Single Phase 100-115 VAC	-	Not Included	301 to 500	400	Standard 1 m	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,263.05 €	1	38 Days	300	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Standard 3 m	108	300	Straight	Positioning function built-in type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,461.79 €	1	38 Days	350	50.1 to 100.0	-	-	-	Single Phase 200-240 VAC	-	Not Included	301 to 500	400	Standard 3 m	108	400	Straight	Positioning function built-in type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,613.09 €	1	38 Days	400	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 100-115 VAC	-	Included	301 to 500	400	Standard 2 m	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,507.22 €	1	38 Days	750	50.1 to 100.0	-	-	-	Single Phase 100-115 VAC	-	Not Included	301 to 500	400	Standard 3 m	108	230	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,598.54 €	1	38 Days	800	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Standard 3 m	108	200	Straight	Positioning function built-in type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,532.91 €	1	38 Days	850	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Standard 3 m	108	180	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Actuator + driver set product
1,437.86 €	1	38 Days	400	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Standard 1 m	108	300	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,618.08 €	1	38 Days	150	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-240 VAC	-	Included	301 to 500	360	Standard 3 m	108	400	Right reversed motor	Positioning function built-in type	Width 74 × Height 66.5	AR Series	With electromagnetic brake	-	Actuator + driver set product
1,245.80 €	1	18 Days	100	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting left direction	Individual actuator
1,270.07 €	1	18 Days	150	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting left direction	Individual actuator
1,063.95 €	1	18 Days	200	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
1,115.25 €	1	18 Days	400	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting left direction	Individual actuator
1,398.24 €	1	18 Days	650	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting left direction	Individual actuator
1,245.80 €	1	18 Days	100	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting right direction	Individual actuator
1,270.07 €	1	18 Days	150	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	Suction fitting right direction	Individual actuator
1,063.95 €	1	18 Days	200	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
1,113.83 €	1	18 Days	350	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
1,115.25 €	1	18 Days	400	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	Suction fitting right direction	Individual actuator
1,130.29 €	1	18 Days	50	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
924.30 €	1	18 Days	100	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
924.30 €	1	18 Days	100	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
948.43 €	1	18 Days	150	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,157.40 €	1	18 Days	200	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
974.05 €	1	18 Days	250	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,181.59 €	1	18 Days	250	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
975.47 €	1	18 Days	300	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,207.15 €	1	18 Days	350	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,208.58 €	1	18 Days	400	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,232.90 €	1	18 Days	450	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,234.27 €	1	18 Days	500	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	400	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,234.27 €	1	18 Days	500	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,259.88 €	1	18 Days	600	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	350	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,076.60 €	1	18 Days	650	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,284.15 €	1	18 Days	650	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	300	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,078.03 €	1	18 Days	700	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	260	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,285.57 €	1	18 Days	700	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	260	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,102.22 €	1	18 Days	750	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	230	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,309.76 €	1	18 Days	750	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	230	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,311.13 €	1	18 Days	800	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	400	Not Included	108	200	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
967.93 €	1	28 Days	850	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	400	Not Included	108	180	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AR Series	Single axis shaft	-	Individual actuator
1,127.90 €	1	18 Days	850	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	400	Not Included	108	180	Straight	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
922.87 €	1	18 Days	50	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	360	Not Included	108	400	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,130.29 €	1	18 Days	50	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Not Included	108	300	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
975.47 €	1	18 Days	300	50.1 to 100.0	-	-	-	Single Phase 200-230 VAC	-	Not Included	301 to 500	360	Not Included	108	400	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
975.47 €	1	18 Days	300	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	360	Not Included	108	300	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,259.88 €	1	18 Days	600	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Not Included	108	300	Left reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,130.29 €	1	18 Days	50	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Not Included	108	300	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,131.71 €	1	18 Days	100	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	360	Not Included	108	400	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,155.98 €	1	18 Days	150	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Not Included	108	300	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,183.02 €	1	18 Days	300	50.1 to 100.0	-	20.1 to 50.0	-	24/48 V DC	-	Included	301 to 500	360	Not Included	108	300	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
999.74 €	1	18 Days	350	50.1 to 100.0	-	-	-	24/48 V DC	-	Not Included	301 to 500	360	Not Included	108	300	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	Single axis shaft	-	Individual actuator
1,208.58 €	1	18 Days	400	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	360	Not Included	108	400	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator
1,258.46 €	1	18 Days	550	50.1 to 100.0	-	20.1 to 50.0	-	Single Phase 200-230 VAC	-	Included	301 to 500	360	Not Included	108	400	Right reversed motor	Pulse Train Input Type	Width 74 × Height 66.5	AZ Series	With electromagnetic brake	-	Individual actuator

Basic information

Main Body, Peripheral Components	Main Body	Type	Sliders	Drive Method	Rolled Ball Screw
Guide	Included	Position Detection	Absolute	I/O Module	Not Included
Noise Filters	Not Included	Usage Environment	Standard

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Basic Attributes

Stroke(mm)
50

100

150

200

250

300

350

400

450

500

550

600

650

700

750

800

850
Clear
Max. Transportable Mass (Horizontal)(kg)
7.5

15
Clear
Max. Transportable Mass Range (Vertical)(kg)
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
Clear
Max. Transportable Mass (Vertical)(kg)
3.5

7

12.5

14
Clear
Input Power Supply
Single Phase 100-115 VAC

Single Phase 200-230 VAC

3-phase 200-230 VAC

Single Phase 200-240 VAC

24/48 V DC
Clear
Table Width W1(mm)
54
Clear
Electromagnetic Break
- Not Included
- Included
Clear
Max. Thrust Force Range(N)
- 0 to 100
- 101 to 200
- 301 to 500
Clear
Max. Thrust Force(N)
43

70

86

125

200

360

400
Clear
Cable
Standard 1 m

Standard 3 m

Not Included

Standard 2 m
Clear
Table Length L1(mm)
72

108
Clear
Maximum Velocity(mm/sec)
180

200

220

230

260

270

300

350

400

420

460

470

550

600

640

650

800
Clear
Motor Mounting Direction
- Left reversed motor
- Right reversed motor
- Straight
Clear
Driver Type
- Positioning function built-in type
- Pulse Train Input Type
Clear
Slider Size(mm)
- Width 54 × Height 50
- Width 74 × Height 50
- Width 74 × Height 66.5
Clear
On-Board Motor
- AR Series
- AZ Series
Clear
Motor Part Shape
- Single axis shaft
- With electromagnetic brake
Clear
Suction Fitting Direction
- Suction fitting left direction
- Suction fitting right direction
Clear
Product Type
- Actuator + driver set product
- Individual actuator
Clear
Type
- EZS3
- EZS4
- EZS6
- EZSM3
- EZSM4
- EZSM6
Clear
Max. Transportable Mass Range (Horizontal)(kg)
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
Clear