SMC Single Axis Robots（Max. Thrust Force Range：201 to 300）
| Shipping Days |
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?* Information on days to ship and prices
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Electric Actuator Rod Type LEY Series Step Motor/Servo Motor
SMC
[Features]
·Supports long strokes: MAX. 500 mm
·Direct mounting 3 directions, metal fitting mounting 3 types
·Auto switch can be installed
·Speed control / positioning: Up to 64 points
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.- 2D / 3D CAD data available
Starting from∗ ： 602.11 € Min. Shipping Days ： 7 Days *Unit price with basic configuration
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Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor
SMC
[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive- 2D / 3D CAD data available
Starting from∗ ： 1,453.37 € Min. Shipping Days ： 4 Days *Unit price with basic configuration
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Electric actuator rod type motorless specification LEY series
SMC
It can be combined with your familiar motors and drivers.- 2D / 3D CAD data available
Starting from∗ ： 475.09 € Min. Shipping Days ： 9 Days *Unit price with basic configuration
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Electric actuator rod type LEY series AC servo motor LECS□
SMC
[Features]
·High-Power Motor (100W/200W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder- 2D / 3D CAD data available
Starting from∗ ： 1,000.57 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator rod type with guide motorless specification LEYG series
SMC
[Features] It can be combined with your familiar motors and drivers.- 2D / 3D CAD data available
Starting from∗ ： 766.57 € Min. Shipping Days ： 9 Days *Unit price with basic configuration
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Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor
SMC
[Features]
·The guide rod is compactly integrated to achieve lateral load resistance and high-precision detent.
·Tip lateral load: 5 times (Comparison of rod type, size 25, 100 strokes)
·Compatible with plain bearings and ball bush bearings
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.- 2D / 3D CAD data available
Starting from∗ ： 786.03 € Min. Shipping Days ： 7 Days *Unit price with basic configuration
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Electric actuator slider type belt drive motorless specification LEFB series
SMC
It can be combined with your familiar motors and drivers.- 2D / 3D CAD data available
Starting from∗ ： 1,782.64 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator slider type belt drive LEFB series AC servo motor LECY□
SMC
[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Belt drive- 2D / 3D CAD data available
Starting from∗ ： 3,130.23 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□
SMC
[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive- 2D / 3D CAD data available
Starting from∗ ： 1,767.56 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator rod type LEY series AC servo motor LECY□
SMC
[Features]
·High-Power Motor (100W/200W/400W)
·Improved high-speed transport capacity
·Supports high acceleration / deceleration (5,000 mm/s2)
·Equipped with absolute encoder- 2D / 3D CAD data available
Starting from∗ ： 1,210.83 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series, LECS□
SMC
[Features]
·Protective Enclosure: IP65 equivalent
·Supports up to 500 mm stroke- 2D / 3D CAD data available
Starting from∗ ： 1,329.79 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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- Promotional pricing
Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series
SMC
A motorless specification electric actuator.
[Features]
· The motorless design permits the mounting of various servo motors.
· Compatible with motors/drivers that have been conventionally used.
· Slider type.
· RoHS compliant.
· Size 25 - stroke: 50 to 800 mm.
· Size 32 - stroke: 50 to 1,000 mm.
· Size 40 - stroke: 150 to 1,200 mm.Starting from∗ ： 1,280.53 € Special price Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series
SMC
[Features] It can be combined with your familiar motors and drivers.- 2D / 3D CAD data available
Starting from∗ ： 1,932.06 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□
SMC
[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt drive- 2D / 3D CAD data available
Starting from∗ ： 2,442.79 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□
SMC
[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Ball screw drive- 2D / 3D CAD data available
Starting from∗ ： 2,562.24 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator slider type belt drive LEFB series AC servo motor LECS□
SMC
[Features]
·Easy to install the main body / reduce installation man-hours
The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Belt drive- 2D / 3D CAD data available
Starting from∗ ： 2,379.89 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator guided rod type LEYG series AC servo motor LECS□
SMC
[Features]
·The guide rod is compactly integrated to achieve lateral load resistance and high-precision detent.
·Tip lateral load: 5 times (Comparison of rod type, size 25, 100 strokes)
·Compatible with plain bearings and ball bush bearings
·Pressing control can be switched
Can be held with the rod pressed against the work, etc.- 2D / 3D CAD data available
Starting from∗ ： 1,227.11 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series
SMC
Vacuum suction from the vacuum port suppresses dust generation from the ball screw and guide to the outside.
[Features]
·Built-in vacuum piping
·The main body can be installed without removing exterior parts such as covers.
·Body body linear guide specifications- 2D / 3D CAD data available
Starting from∗ ： 1,783.29 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, Rod Type, Dust-Tight / Drip-Proof (Equivalent to IP65) Specifications, LEY-X5 Series
SMC
[Features]
·Protective Enclosure: IP65 equivalent
·Supports up to 500 mm stroke- 2D / 3D CAD data available
Starting from∗ ： 1,093.46 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□
SMC
Vacuum suction from the vacuum port suppresses dust generation from the ball screw and guide to the outside.
[Features]
·Built-in vacuum piping
·The main body can be installed without removing exterior parts such as covers.
·Body body linear guide specificationsStarting from∗ ： 2,721.89 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□
SMC
[Features]
·Easy to install the main body / reduce installation man-hours
·The main body can be installed without removing exterior parts such as covers.
·Table position can be detected by auto switch
·Up to 4 locations can be attached to both sides of the body
·Ball screw drive- 2D / 3D CAD data available
Starting from∗ ： 2,300.39 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□
SMC
[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Ball screw driveStarting from∗ ： 2,740.10 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□
SMC
[Features]
·Thin low center of gravity
·High precision / high rigidity
·Reduction of installation man-hours
·Weight reduced by about 37%
·No interference with the workpiece motor
·Belt driveStarting from∗ ： 2,733.39 € Min. Shipping Days ： 26 Days *Unit price with basic configuration
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| Main Body, Peripheral Components |
| Type |
| Stroke(mm) |
| Max. Transportable Mass Range (Horizontal)(kg) |
| Max. Transportable Mass (Horizontal)(kg) |
| Max. Transportable Mass Range (Vertical)(kg) |
| Max. Transportable Mass (Vertical)(kg) |
| Drive Method |
| Guide |
| Lead(mm) |
| Input Power Supply |
| Position Detection |
| I/O Module |
| Table Width W1(mm) |
| Brake |
| Max. Thrust Force Range(N) |
| Max. Thrust Force(N) |
| Noise Filters |
| Table Length L1(mm) |
| Usage Environment |
| Positioning Repeatability(µm) |
| Maximum Velocity(mm/sec) |
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| Brand | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC | SMC |
| Product Series | Electric Actuator Rod Type LEY Series Step Motor/Servo Motor | Electric Actuator Slider Type Ball Screw Drive LEFS Series Step Motor/Servo Motor | Electric actuator rod type motorless specification LEY series | Electric actuator rod type with guide motorless specification LEYG series | Electric Actuator Rod With Guide Type LEYG Series Step Motor/Servo Motor | Electric actuator slider type belt drive motorless specification LEFB series | Electric actuator slider type belt drive LEFB series AC servo motor LECY□ | Electric actuator slider type ball screw drive LEFS series AC servo motor LECS□ | Electric Actuator, Slider Type, Ball Screw Drive, Motorless Type LEFS Series | Electric actuator high rigidity slider type ball screw drive motorless specification LEJS series | Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECS□ | Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECS□ | Electric actuator slider type belt drive LEFB series AC servo motor LECS□ | Electric actuator guided rod type LEYG series AC servo motor LECS□ | Electric Actuator, Slider Type, Ball Screw Drive, Clean Specifications, 11-LEFS Series | Electric Actuator, High Stiffness Slider Type, Ball Screw Drive, 11-LEJS Series, LECS□ | Electric actuator slider type ball screw drive LEFS series AC servo motor LECY□ | Electric Actuator, High Stiffness Slider Type, Ball Screw Drive LEJS Series, LECY□ | Electric actuator high rigidity slider type belt drive LEJB series AC servo motor LECY□ | ||||
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| Starting from∗ | 602.11 € *Unit price with basic configuration | 1,453.37 € *Unit price with basic configuration | 475.09 € *Unit price with basic configuration | 1,000.57 € *Unit price with basic configuration | 766.57 € *Unit price with basic configuration | 786.03 € *Unit price with basic configuration | 1,782.64 € *Unit price with basic configuration | 3,130.23 € *Unit price with basic configuration | 1,767.56 € *Unit price with basic configuration | 1,210.83 € *Unit price with basic configuration | 1,329.79 € *Unit price with basic configuration | 1,280.53 € Special price *Unit price with basic configuration Promotional pricing | 1,932.06 € *Unit price with basic configuration | 2,442.79 € *Unit price with basic configuration | 2,562.24 € *Unit price with basic configuration | 2,379.89 € *Unit price with basic configuration | 1,227.11 € *Unit price with basic configuration | 1,783.29 € *Unit price with basic configuration | 1,093.46 € *Unit price with basic configuration | 2,721.89 € *Unit price with basic configuration | 2,300.39 € *Unit price with basic configuration | 2,740.10 € *Unit price with basic configuration | 2,733.39 € *Unit price with basic configuration |
| Min. Shipping Days ： | 7 Days | 4 Days | 9 Days | 26 Days | 9 Days | 7 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days | 26 Days |
| Main Body, Peripheral Components | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body | Main Body |
| Type | Rods | Sliders | Rods | Rods | Rods | Rods | Sliders | Sliders | Sliders | Rods | Rods | Sliders | Sliders | Sliders | Sliders | Sliders | Rods | Sliders | Rods | Sliders | Sliders | Sliders | Sliders |
| Stroke(mm) | 30 ～ 500 | 1,000 ～ 900 | 30 ～ 400 | 30 ～ 400 | 30 ～ 300 | 30 ～ 300 | 1,000 ～ 3000 | 1,000 ～ 3000 | 1,000 ～ 900 | 100 ～ 200 | 100 | 1,000 ～ 950 | 1,000 ～ 900 | 1,000 ～ 3000 | 1,000 ～ 900 | 1,000 ～ 3000 | 30 ～ 300 | 100 ～ 200 | 30 ～ 400 | 300 ～ 500 | 100 ～ 750 | 1,000 ～ 900 | 1,000 ～ 3000 |
| Max. Transportable Mass Range (Horizontal)(kg) | 20.1 to 50.0 / 50.1 to 100.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 / 50.1 to 100.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 / 50.1 to 100.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 | 20.1 to 50.0 |
| Max. Transportable Mass (Horizontal)(kg) | 30 ～ 60 | 25 ～ 30 | 50 | 50 | 50 | 50 ～ 60 | 25 | 25 | 30 | 50 | 50 | 30 | 30 | 30 | 30 | 25 | 50 | 30 | 50 ～ 60 | 30 | 30 | 30 | 30 |
| Max. Transportable Mass Range (Vertical)(kg) | 10.1 to 20.0 | 0 to 2.0 / 5.1 to 10.0 / 10.1 to 20.0 | 10.1 to 20.0 | 10.1 to 20.0 | 10.1 to 20.0 | 10.1 to 20.0 | - | - | 2.1 to 5.0 / 5.1 to 10.0 | 10.1 to 20.0 | 10.1 to 20.0 | 2.1 to 5.0 / 5.1 to 10.0 | 2.1 to 5.0 / 5.1 to 10.0 | - | 2.1 to 5.0 / 5.1 to 10.0 | - | 10.1 to 20.0 | 10.1 to 20.0 | 10.1 to 20.0 | 2.1 to 5.0 | 2.1 to 5.0 / 5.1 to 10.0 | 2.1 to 5.0 / 5.1 to 10.0 | - |
| Max. Transportable Mass (Vertical)(kg) | 13 ～ 16 | 2 ～ 15 | 16 | 16 | 15 | 11 ～ 15 | - | - | 5 ～ 7 | 16 | 16 | 5 ～ 7 | 5 ～ 6 | - | 5 ～ 6 | - | 15 | 15 | 15 | 5 | 5 ～ 7 | 5 ～ 6 | - |
| Drive Method | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Belts | Belts | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Belts | Rolled Ball Screw | Belts | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Rolled Ball Screw | Belts |
| Guide | Not Provided | Provided | Provided | Not Provided | Provided | Provided | Provided | Provided | Provided | Not Provided | Not Provided | Provided | Provided | Provided | Provided | Provided | Provided | Provided | Not Provided | Provided | Provided | Provided | Provided |
| Lead(mm) | 6 ～ 16 | 6 ～ 30 | 6 | 6 | 6 | 6 ～ 16 | 54 equivalent | 54 equivalent | 24 ～ 30 | 6 | 6 | 24 ～ 30 | 16 ～ 30 | 42 | 16 ～ 30 | 54 equivalent | 6 | 6 | 6 | 16 | 24 ～ 30 | 16 ～ 30 | 42 |
| Input Power Supply | 24 V DC | 24 V DC | - | - | - | 24 V DC | - | - | - | - | - | - | - | - | - | - | - | 24 V DC | 24 V DC | - | - | - | - |
| Position Detection | Incremental | Incremental | - | Incremental / Absolute | - | Incremental | - | Absolute | Incremental / Absolute | Absolute | Absolute | Incremental | - | Incremental / Absolute | Incremental / Absolute | Incremental / Absolute | Incremental / Absolute | Incremental | Incremental | Incremental | Absolute | Absolute | Absolute |
| I/O Module | NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET | NPN / PNP / DeviceNet / Ethernet / EtherCAT / IO-Link / PROFINET | - | - | - | NPN / PNP / DeviceNet / Ethernet / Not Provided / EtherCAT / PROFINET | - | - | - | - | - | - | - | - | - | - | - | Ethernet / PROFINET | PNP / DeviceNet / Ethernet / Not Provided / PROFINET | - | - | - | - |
| Table Width W1(mm) | - | 50 ～ 74 | - | - | - | - | 74 | 74 | 60 ～ 74 | - | - | 60 ～ 74 | 105 ～ 129 | 129 | 105 ～ 129 | 74 | - | 50 | - | 105 | 60 ～ 74 | 105 ～ 129 | 129 |
| Brake | Not Provided / Provided | Not Provided / Provided | Not Provided | Not Provided / Provided | Not Provided | Not Provided / Provided | Not Provided | Not Provided | Not Provided / Provided | Not Provided / Provided | Not Provided | Not Provided | Not Provided | Not Provided / Provided | Not Provided / Provided | Not Provided / Provided | Not Provided / Provided | Not Provided | Not Provided / Provided | Not Provided / Provided | Not Provided / Provided | Not Provided / Provided | Not Provided / Provided |
| Max. Thrust Force Range(N) | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 | 201 to 300 |
| Max. Thrust Force(N) | 238 ～ 283 | 245 ～ 294 | 255 | 255 | 255 | 238 ～ 283 | 245 | 245 | 294 | 255 | 255 | 294 | 294 | 294 | 294 | 245 | 255 | 294 | 238 | 294 | 294 | 294 | 294 |
| Noise Filters | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided | Not Provided |
| Table Length L1(mm) | - | 102 ～ 170 | - | - | - | - | 170 | 170 | 122 ～ 170 | - | - | 122 ～ 170 | 160 ～ 172 | 172 | 160 ～ 172 | 170 | - | 102 | - | 160 | 122 ～ 170 | 160 ～ 172 | 172 |
| Usage Environment | Standard | Standard | Dust Resistant | Standard | Standard | Standard | Standard | Standard | Standard | Dust Resistant | Dust Resistant | Standard | Standard | Standard | Standard | Standard | Standard | Standard | Dust Resistant | Standard | Standard | Standard | Standard |
| Positioning Repeatability(µm) | ±20 | ±15 ～ ±20 | ±10 ～ ±20 | ±10 ～ ±20 | ±10 ～ ±20 | ±20 | ±60 | ±60 | ±10 ～ ±20 | ±20 | ±20 | ±10 ～ ±20 | ±10 ～ ±20 | ±40 | ±10 ～ ±20 | ±60 | ±10 ～ ±20 | ±20 | ±20 | ±20 | ±10 ～ ±20 | ±10 ～ ±20 | ±40 |
| Maximum Velocity(mm/sec) | 250 ～ 500 | 1,140 ～ 930 | 300 ～ 450 | 300 ～ 450 | 450 | 250 ～ 500 | 2000 | 2000 | 1,140 ～ 930 | 450 | 450 | 1,140 ～ 930 | 1,200 ～ 1800 | 3000 | 1,200 ～ 1800 | 2000 | 450 | 250 | 200 | 1,200 | 1,140 ～ 930 | 1,200 ～ 1800 | 3000 |
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Main Body, Peripheral Components
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Max. Transportable Mass Range (Horizontal)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 150.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
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Max. Transportable Mass (Horizontal)(kg)
- 0.75
- 1
- 1.5
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- 2.4
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- 45
- 50
- 55
- 60
- 65
- 70
- 80
- 85
- 90
- 200
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
-
Max. Transportable Mass Range (Vertical)(kg)
- 0 to 2.0
- 2.1 to 5.0
- 5.1 to 10.0
- 10.1 to 20.0
- 20.1 to 50.0
- 50.1 to 100.0
- 100.1 or Higher
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
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Max. Transportable Mass (Vertical)(kg)
- 0.05
- 0.1
- 0.25
- 0.5
- 1
- 1.5
- 2
- 2.5
- 3
- 3.5
- 4
- 4.5
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- 8.5
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- 12.5
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- 28.5
- 29
- 30
- 35
- 37
- 38
- 41
- 42
- 43
- 44
- 46
- 50
- 51
- 53
- 72
- 115
- Not vertical
The calculation method differs depending on the manufacturer. For details, see the technical data provided by the relevant manufacturer.
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Drive Method
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Guide
-
Lead(mm)
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Input Power Supply
-
Position Detection
-
I/O Module
- NPN
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- CC-Link
- DeviceNet
- Ethernet
- Not Provided
- EtherCAT
- IO-Link
- PROFINET
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Table Width W1(mm)
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Brake
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Max. Thrust Force Range(N)
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Max. Thrust Force(N)
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Noise Filters
-
Table Length L1(mm)
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Usage Environment
-
Positioning Repeatability(µm)
-
Maximum Velocity(mm/sec)
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