Vacuum Valves（Flange Type：KF）

Shipping Days	All 4 Days or Less 7 Days or Less 8 Days or Less 12 Days or Less 15 Days or Less 17 Days or Less 18 Days or Less 20 Days or Less 22 Days or Less 26 Days or Less

?* Information on days to ship and prices

• 

  XLH, High Vacuum Manual Angle Valve, Bellows Seal

  SMC

  A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  2D / 3D CAD data available

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  Starting from∗ ：	440.59 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  Stainless Steel High Vacuum Angle Valves / In-Line Valves, Double Acting / Bellows Seal, XMC/XYC Series

  SMC

  Vacuum valve with precision-cast single-piece structure which helps prevent gas accumulation.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Pressure balanced structure.
  · Body material: SCS13 (SUS304 equivalent).
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

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  Starting from∗ ：	626.70 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  XM and XY / High Vacuum Valves / Stainless Steel / Angle and In-line Types / 2-port Valve

  SMC

  A vacuum valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
  [Features]
  · Bellows type is particulate-free and cleaned.
  · Low actuation torque (0.5 N·m or less).
  · Spring provides a standard sealing load.
  · Handle height remains the same regardless of whether valve is open or closed.
  · Equipped as standard with an indicator for confirming if the valve is open or closed.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

  Select to compare

  Configure now
  Starting from∗ ：	545.09 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valve, Double Acting / Bellows Seal, XLC Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  2D / 3D CAD data available

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  Starting from∗ ：	462.87 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valves, Double Acting, O-Ring Seal, XLG Series

  SMC

  [Features]
  · Aluminum body
  · Uniform baking temperature
  · Lightweight and compact
  · Low outgassing
  · Little heavy metal contamination
  · Resistant to fluorine corrosion
  · Replaceable bellows (bellows-seal type)

  2D / 3D CAD data available

  Select to compare

  Configure now
  Starting from∗ ：	472.09 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

• 

  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Prevents pumps from running when overloaded.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

  2D / 3D CAD data available

  Select to compare

  Configure now
  Starting from∗ ：	884.79 €
  Min. Shipping Days ：	22 Days

  *Unit price with basic configuration

• 

  Stainless Steel High Vacuum L-Shaped, Straight Valve, Two-Stage Control, Single Acting, Bellows, O-Ring Seal, XMD/XYD

  SMC

  A vacuum valve for preventing pumps from running when overloaded.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve)
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Adjustable flow rate for initial exhaust valve.
  · Body material: SCS13 (SUS304 equivalent).
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · The XM Series is interchangeable with XL Series aluminum high vacuum angle valves.

  2D / 3D CAD data available

  Select to compare

  Configure now
  Starting from∗ ：	819.61 €
  Min. Shipping Days ：	26 Days

  *Unit price with basic configuration

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