Vacuum Valves（Type：Vacuum operation vacuum valves）

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  XMA and XYA / High Vacuum Valves / Stainless Steel / Angle and In-line Types

  SMC

  A vacuum valve with a pressure balanced structure.
  [Features]
  · Body material: SCS13 (SUS304 equivalent). Made of stainless steel.
  · Precision-cast single-piece structure which helps prevent gas accumulation.
  · Interchangeable with XL Series aluminum high-vacuum angle valves.
  · Bellows type is particulate-free and cleaned.

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  Starting from∗ ：	520.09 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

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  Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

  SMC

  A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
  [Features]
  · Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
  · Allows for compact system designs and reduced piping.
  · Prevents dust turbulence inside the chamber when exhausting.
  · Prevents pumps from running when overloaded.
  · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
  · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
  · Low sputtering yield minimizes heavy metal contamination of wafers.

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  Starting from∗ ：	884.79 €
  Min. Shipping Days ：	22 Days

  *Unit price with basic configuration

• 

  High Vacuum Air Operated Valve AVB*17 Series

  CKD

  Durable with a long service life. NC type. Light and compact thanks to adoption of aluminum alloy body.

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  Starting from∗ ：	492.56 €
  Min. Shipping Days ：	8 Days

  *Unit price with basic configuration

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  XLA-2, Aluminium High Vacuum Angle Valve, Normally Closed / Bellows Seal

  SMC

  Vacuum regulator with low outgassing.
  [Features]
  · Aluminum body.
  · Replaceable bellows.
  · Uniform baking temperature.
  · Lightweight and compact.
  · Little heavy metal contamination.

  2D / 3D CAD data available

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  Starting from∗ ：	437.59 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

• 

  ZP2V, Vacuum Saving Valve

  SMC

  A vacuum valve which inhibits drops in vacuum pressure, even when no workpiece is present.
  [Features]
  · Keeps hold of workpieces when multiple vacuum pads are used by a single vacuum generator.
  · Protects against drops in vacuum pressure, even when some pads are not suctioning.
  · Single-action fitting models now also available.
  · No need for switching the operation when changing out workpieces.
  · Allows the simplification of control circuits when workpieces have different shapes.
  · Fixed orifice size: 0.3 mm, 0.5 mm, 0.7 mm, 1 mm.

  2D / 3D CAD data available

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  Starting from∗ ：	12.45 €
  Min. Shipping Days ：	4 Days

  *Unit price with basic configuration

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